LiNbO3 channel and ridge waveguides based on helium ion implantation combined with lithography and precise diamond dicing

Lithium niobate (LiNbO3, LN) channel and ridge waveguides have been successfully fabricated by He ion implantation, which has energy of 500 keV fluence 1.5×1016 ions/cm2 is combined with lithography the precise diamond dicing technique. The refractive index profile annealed LN planar waveguide was reconstructed. propagation loss a width 10 µm that widths 25 15 were investigated end-face coupling method. In our work, factors affect properties revealed.